%0 Book Section
%4 sid.inpe.br/mtc-m21b/2015/12.15.12.04
%2 sid.inpe.br/mtc-m21b/2015/12.15.12.04.36
%F self-archiving-INPE-MCTI-GOV-BR
%T Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material
%D 2015
%A Fraga, Mariana Amorim,
%A Bosi, Matteo,
%A Negri, Marco,
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%E Saddow, S.,
%E La Via, F.,
%B Advanced Silicon Carbide Devices and Processing
%I Intech
%P 256
%K Silicon.
%@language en
%3 SiC_thin_film_bulk.pdf